Title :
Multichannel shear horizontal surface acoustic wave microsensor for liquid characterization
Author :
Kondoh, Jun ; Saito, Kazuki ; Shiokawa, Showko ; Suzuki, Hideyuki
Author_Institution :
Fac. of Eng., Shizuoka Univ., Japan
Abstract :
Surface Acoustic wave (SAW) with a shear horizontal polarized displacement (SH-SAW) can detect mechanical and electrical properties of an adjacent liquid. The objective of this paper is to propose a new multichannel SH-SAW microsensor for liquid characterization. The SH-SAW microsensor, which is fabricated on 36° rotated Y-cut X-propagating LiTaO3, consists of three SAW delay lines. Propagating surfaces of two delay lines are metallized and electrically shorted, and the other one has a free surface for working as an electrically active area. The viscosity, conductivity, and permittivity of liquid are simultaneously obtained by using the multichannel SH-SAW microsensor
Keywords :
electrical conductivity measurement; microsensors; permittivity measurement; surface acoustic wave delay lines; surface acoustic wave sensors; viscosity measurement; LiTaO3; SAW delay line; Y-cut X-propagating LiTaO3; conductivity; electrical properties; liquid measurements; mechanical properties; multichannel SH-SAW microsensor; permittivity; shear horizontal surface acoustic waves; viscosity; Acoustic signal detection; Acoustic waves; Conductivity; Delay lines; Mechanical factors; Metallization; Microsensors; Polarization; Surface acoustic waves; Viscosity;
Conference_Titel :
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2940-6
DOI :
10.1109/ULTSYM.1995.495618
