Multichannel shear horizontal surface acoustic wave microsensor for liquid characterization

Author

Kondoh, Jun ; Saito, Kazuki ; Shiokawa, Showko ; Suzuki, Hideyuki

Author_Institution

Fac. of Eng., Shizuoka Univ., Japan

Volume

1

fYear

1995

fDate

7-10 Nov 1995

Firstpage

445

Abstract

Surface Acoustic wave (SAW) with a shear horizontal polarized displacement (SH-SAW) can detect mechanical and electrical properties of an adjacent liquid. The objective of this paper is to propose a new multichannel SH-SAW microsensor for liquid characterization. The SH-SAW microsensor, which is fabricated on 36° rotated Y-cut X-propagating LiTaO₃, consists of three SAW delay lines. Propagating surfaces of two delay lines are metallized and electrically shorted, and the other one has a free surface for working as an electrically active area. The viscosity, conductivity, and permittivity of liquid are simultaneously obtained by using the multichannel SH-SAW microsensor

Keywords

electrical conductivity measurement; microsensors; permittivity measurement; surface acoustic wave delay lines; surface acoustic wave sensors; viscosity measurement; LiTaO₃; SAW delay line; Y-cut X-propagating LiTaO₃; conductivity; electrical properties; liquid measurements; mechanical properties; multichannel SH-SAW microsensor; permittivity; shear horizontal surface acoustic waves; viscosity; Acoustic signal detection; Acoustic waves; Conductivity; Delay lines; Mechanical factors; Metallization; Microsensors; Polarization; Surface acoustic waves; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE

Conference_Location

Seattle, WA

ISSN

1051-0117

Print_ISBN

0-7803-2940-6

Type

conf

DOI

10.1109/ULTSYM.1995.495618

Filename

495618