Title :
The influence of PcCu layer crystalline structure on the temperature stability of SAW gas sensors
Author :
Hechner, J. ; Wróbel, T.
Author_Institution :
Inst. of Electron Mater. Technol., Warsaw, Poland
Abstract :
The effect of temperature on the frequency shift of NO2 SAW chemosensors has been studied. Copper phthalocyanine was used as the chemical interface. We have investigated the influence of crystalline structure of PcCu coating on the temperature frequency stability of SAW delay lines on STX-quartz and 128°YX lithium niobiate. It was found that the temperature generated frequency change is much lower for the delay lines covered with β-PcCu films than for the lines employing the α-PcCu layers of the same mass. This is valid for both used substrates
Keywords :
copper compounds; frequency stability; gas sensors; organic compounds; surface acoustic wave delay lines; surface acoustic wave sensors; α-PcCu film; β-PcCu film; 128°YX lithium niobiate substrate; LiNbO3; NO2; NO2 chemosensor; SAW gas sensor; STX-quartz substrate; SiO2; chemical interface; copper phthalocyanine layer; crystalline structure; delay line; frequency shift; temperature stability; Chemicals; Coatings; Copper; Crystallization; Delay lines; Frequency; Lithium; Stability; Surface acoustic waves; Temperature;
Conference_Titel :
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2940-6
DOI :
10.1109/ULTSYM.1995.495636
