Accurate modeling of CMUTs [capacitive micromachined ultrasonic transducers]

Author

Lerch, R. ; Kaltenbacher, M. ; Hauck, A. ; Link, G. ; Hofer, M.

Author_Institution

Dept. of Sensor Technol., Univ. of Erlangen, Germany

Volume

1

fYear

2004

fDate

23-27 Aug. 2004

Firstpage

264

Abstract

The design of micromachined transducers strongly depends on the availability of appropriate computer aided engineering (CAE) tools, since the fabrication of each prototype is quite costly. We have developed a CAE environment for the computer simulation of CMUTs. The schemes are based on the finite element (FE) method and take all relevant nonlinearities (geometric nonlinearity of the mechanical structures, electrostatic force, moving body in an electrostatic field) and couplings between the different physical fields (electrostatic, mechanical and acoustic fields) into account.

Keywords

acoustic field; capacitive sensors; computer aided engineering; electric fields; finite element analysis; mechanical properties; micromechanical devices; ultrasonic transducers; CAE tools; CMUT modeling; acoustic fields; capacitive micromachined ultrasonic transducers; computer aided engineering; coupled physical fields; electrostatic fields; electrostatic force; finite element method; mechanical fields; mechanical structure geometric nonlinearity; moving body electrostatic field effects; partial differential equations; Acoustic transducers; Acoustic waves; Computer aided engineering; Couplings; Electrostatics; Fabrication; Piezoelectric transducers; Tensile stress; Ultrasonic imaging; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2004 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-8412-1

Type

conf

DOI

10.1109/ULTSYM.2004.1417717

Filename

1417717