A microelectromechanical quartz rotational rate sensor for inertial applications

Author

Madni, Asad M. ; Wan, Lawrence A. ; Hammons, Sheritlan

Author_Institution

BEI Sensors & Syst. Co. Inc., Sylmar, CA, USA

Volume

2

fYear

1996

fDate

3-10 Feb 1996

Firstpage

315

Abstract

A quartz rotational rate sensor based on the Coriolis effect is presented. The sensor which consists of a microminiature double-ended quartz tuning fork and supporting structure, all fabricated chemically from a single wafer of monocrystalline piezoelectric quartz provides a simple, elegant and reliable measurement of rotational velocity. The theory of operation, performance parameters and applications in the aerospace, industrial, commercial and automotive sectors are provided

Keywords

Coriolis force; angular velocity measurement; crystal resonators; electric sensing devices; microsensors; piezoelectric thin films; Coriolis effect; SiO₂; aerospace industry; applications; automotive industry; commercial use; industrial use; inertial applications; measurement of rotational velocity; microelectromechanical quartz rotational rate sensor; microminiature double-ended quartz tuning fork; monocrystalline piezoelectric quartz; performance; supporting structure; Acceleration; Aerospace industry; Angular velocity; Chemical sensors; Rotation measurement; Sensor systems; Torque; Velocity measurement; Vibrations; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Aerospace Applications Conference, 1996. Proceedings., 1996 IEEE

Conference_Location

Aspen, CO

Print_ISBN

0-7803-3196-6

Type

conf

DOI

10.1109/AERO.1996.495986

Filename

495986