Title :
A microelectromechanical quartz rotational rate sensor for inertial applications
Author :
Madni, Asad M. ; Wan, Lawrence A. ; Hammons, Sheritlan
Author_Institution :
BEI Sensors & Syst. Co. Inc., Sylmar, CA, USA
Abstract :
A quartz rotational rate sensor based on the Coriolis effect is presented. The sensor which consists of a microminiature double-ended quartz tuning fork and supporting structure, all fabricated chemically from a single wafer of monocrystalline piezoelectric quartz provides a simple, elegant and reliable measurement of rotational velocity. The theory of operation, performance parameters and applications in the aerospace, industrial, commercial and automotive sectors are provided
Keywords :
Coriolis force; angular velocity measurement; crystal resonators; electric sensing devices; microsensors; piezoelectric thin films; Coriolis effect; SiO2; aerospace industry; applications; automotive industry; commercial use; industrial use; inertial applications; measurement of rotational velocity; microelectromechanical quartz rotational rate sensor; microminiature double-ended quartz tuning fork; monocrystalline piezoelectric quartz; performance; supporting structure; Acceleration; Aerospace industry; Angular velocity; Chemical sensors; Rotation measurement; Sensor systems; Torque; Velocity measurement; Vibrations; Voltage;
Conference_Titel :
Aerospace Applications Conference, 1996. Proceedings., 1996 IEEE
Conference_Location :
Aspen, CO
Print_ISBN :
0-7803-3196-6
DOI :
10.1109/AERO.1996.495986
