DocumentCode
2969162
Title
RF CMOS-MEMS cantilever resonator
Author
Zainuddin, A. Anwar ; Karim, Jihane ; Nordin, A.N. ; Mohanraj, S.P. ; Taufik, M. Syamsi M. ; Khan, Sharifullah
Author_Institution
ECE Dept., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia
fYear
2013
fDate
25-27 Nov. 2013
Firstpage
1
Lastpage
4
Abstract
This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000.
Keywords
CMOS integrated circuits; Q-factor; cantilevers; micromechanical resonators; radiofrequency integrated circuits; Q-factor; RF CMOS-MEMS resonator; RF transceiver filter; RF transceiver oscillator; cantilever beam; cantilever resonator; frequency 10.2 MHz; voltage 1.5 V; Aluminum; Electrodes; Micromechanical devices; Oscillators; Radio frequency; Resonant frequency; Structural beams; RF-MEMS; beam´s displacement; gain; oscillators; resonators;
fLanguage
English
Publisher
ieee
Conference_Titel
Smart Instrumentation, Measurement and Applications (ICSIMA), 2013 IEEE International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
978-1-4799-0842-4
Type
conf
DOI
10.1109/ICSIMA.2013.6717939
Filename
6717939
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