Optimized membrane configuration improves CMUT performance

Author

Huang, Yongli ; Hæggström, Edward O. ; Zhuang, Xuefeng ; Ergun, Arif S. ; Khuri-Yakub, Butrus T.

Author_Institution

Edward L. Ginzton Lab., Stanford Univ., CA, USA

Volume

1

fYear

2004

fDate

23-27 Aug. 2004

Firstpage

505

Abstract

The performance of a capacitive micromachined ultrasonic transducer (CMUT) was improved by optimizing its membrane configuration. CMUTs with three different membrane configurations: square, rectangular and tent, were designed and fabricated using a process based on the wafer-bonding technique. Paired tests showed that improved transmission (TX) and reception (RX) efficiencies were achieved by using tent or rectangular membranes instead of square membranes. The improvements were 46% and 44% in TX and 43% and 65% in RX, respectively.

Keywords

capacitive sensors; membranes; micromachining; microsensors; optimisation; ultrasonic transducers; wafer bonding; CMUT performance; capacitive micromachined ultrasonic transducer; membrane configuration optimization; reception efficiency; rectangular configuration; square configuration; tent configuration; transmission efficiency; wafer-bonding technique; Bandwidth; Biomembranes; Design optimization; Electrodes; Fabrication; Laboratories; Medical tests; Testing; Ultrasonic transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2004 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-8412-1

Type

conf

DOI

10.1109/ULTSYM.2004.1417773

Filename

1417773