Title :
Silicon Micromachined Multiplier Utilizing Heterostructure Barrier Varactor Diode
Author :
Kirby, P.L. ; Li, Y. ; Xiao, Q. ; Hesler, J.L. ; Papapolymerou, J.
Author_Institution :
Georgia Inst. of Technol., Atlanta
Abstract :
We present for the first time a silicon micromachined waveguide multiplier. The tripler utilizes a heterostructure barrier varactor (HBV) for the active portion. The assembly produces an output power of 7.7 mW with a conversion efficiency of 6.9% at an output frequency of 261 GHz.
Keywords :
frequency multipliers; micromachining; millimetre wave frequency convertors; silicon; varactors; waveguide components; assembly; conversion efficiency; efficiency 6.9 percent; frequency 261 GHz; heterostructure barrier varactor diode; power 7.7 mW; silicon micromachined waveguide multiplier; Circuits; Diodes; Etching; Fabrication; Frequency conversion; Machining; Micromachining; Rectangular waveguides; Silicon; Varactors; DRIE; Frequency Multiplication; Frequency Tripler; Silicon Micromachining;
Conference_Titel :
Microwave Symposium, 2007. IEEE/MTT-S International
Conference_Location :
Honolulu, HI
Print_ISBN :
1-4244-0688-9
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2007.380331
