DocumentCode
2970412
Title
Ion angular distribution in vacuum arc plasma
Author
Nikolaev, A.G. ; Yushkov, Georgy Yu. ; Savkin, K.P. ; Oks, E.M.
Author_Institution
High Current Electron. Inst., Tomsk, Russia
fYear
2012
fDate
2-7 Sept. 2012
Firstpage
372
Lastpage
375
Abstract
The angular distribution of the metal and gaseous ion flow from vacuum arc plasma has been investigated. A Mevva-type ion source and a Time-of-Flight (TOF) mass-spectrometer were used. The experiments were performed using a range of different cathode materials, including C, Al, Zn, Cu, Ti, Co, Cr, W, Pb, Cu0.7Cr0.3, W0.4Co0.17C0.43, and Zn0.4Pb0.6, over a range of vacuum arc discharge parameters. Variable parameters in this study were vacuum arc discharge current, background gas pressure, configuration of cathode-anode gap, and composition of cathode material. A comparison with results obtained by other authors was made. The influence of discharge parameters on the ion angular distribution in a vacuum arc source is discussed.
Keywords
cathodes; plasma diagnostics; plasma flow; plasma pressure; plasma sources; vacuum arcs; Mevva-type ion source; background gas pressure; cathode materials; cathode-anode gap; discharge parameters; gaseous ion flow; ion angular distribution; time-of-flight mass-spectrometer; vacuum arc plasma; Anodes; Cathodes; Ion beams; Materials; Metals; Plasmas; Vacuum arcs;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum (ISDEIV), 2012 25th International Symposium on
Conference_Location
Tomsk
ISSN
1093-2941
Print_ISBN
978-1-4673-1263-9
Electronic_ISBN
1093-2941
Type
conf
DOI
10.1109/DEIV.2012.6412531
Filename
6412531
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