Title :
Selective growth of MWCNT on patterned tungsten at room temperature using oxygen plasma and photo-resist
Author :
Chowdhury, Faisal K. ; Chappanda, Karumbaiah N. ; Tabib-Azar, M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Utah, Salt Lake City, UT, USA
Abstract :
A unique method of growing multi-walled carbon nanotubes (MWCNT) on patterned tungsten regions at room temperature is presented. This technique involves converting photo-resist (PR) on tungsten to CNTs using an oxygen plasma process. Interestingly, regions with PR on un-patterned tungsten do not produce CNTs. Additionally, a CNT density gradient is observed due to “hot spots” created on convex regions of patterned tungsten. These hot spots may be caused by large plasma E-fields in convex regions acting as “lightening” rods. This method can be used to deposit CNTs on patterned metals on plastics and other low temperature substrates.
Keywords :
carbon nanotubes; electromagnetic fields; photoresists; plastics; C; CNT density gradient; MWCNT; PR conversion; lightening rod; low temperature substrate; multiwalled carbon nanotube; oxygen plasma process; patterned tungsten convex region; photoresist conversion; plasma E-field; temperature 293 K to 298 K; Carbon nanotubes; Plasma temperature; Resists; Silicon; Tungsten;
Conference_Titel :
Sensors, 2011 IEEE
Conference_Location :
Limerick
Print_ISBN :
978-1-4244-9290-9
DOI :
10.1109/ICSENS.2011.6127241
