DocumentCode :
2971684
Title :
Features of magnetic compression model as applied to EUV source based on a pseudospark discharge
Author :
Landl, N.V. ; Korolev, Y.D. ; Frants, O.B. ; Geyman, V.G. ; Shemyakin, I.A. ; Bolotov, A.V.
Author_Institution :
Inst. of High Current Electron., Tomsk, Russia
fYear :
2012
fDate :
2-7 Sept. 2012
Firstpage :
584
Lastpage :
587
Abstract :
It is shown that the magnetic compression zero-dimensional model can´t be applied for simulation of the discharge dynamic in the source of EUV radiation based on a pseudospark discharge. Qualitative explanation of the occurrence of radiating area is given.
Keywords :
plasma diagnostics; plasma simulation; plasma sources; sparks; EUV radiation source; discharge dynamic simulation; magnetic compression zero-dimensional model; pseudospark discharge; radiation area; Cathodes; Discharges (electric); Electron beams; Fault location; Inductance; Plasmas;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Discharges and Electrical Insulation in Vacuum (ISDEIV), 2012 25th International Symposium on
Conference_Location :
Tomsk
ISSN :
1093-2941
Print_ISBN :
978-1-4673-1263-9
Electronic_ISBN :
1093-2941
Type :
conf
DOI :
10.1109/DEIV.2012.6412587
Filename :
6412587
Link To Document :
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