DocumentCode :
2972162
Title :
Physical and electrical characteristics of low-temperature annealed spin coated zinc oxide thin films on Teflon substrates
Author :
Sauki, Nur Sa´adah Muhamad ; Rahim, Muhammad Hazman Rafie Abdul ; Herman, Sukreen Hana ; Mahmood, Mohamad Rusop
Author_Institution :
NANO-Electron. Centre, Univ. Teknol. MARA, Shah Alam, Malaysia
fYear :
2012
fDate :
24-27 June 2012
Firstpage :
479
Lastpage :
500
Abstract :
The structural, and electrical properties of ZnO thin films deposited by sol-gel spin coating technique, onto polytetrafluoroethylene (Teflon) and glass substrates have been investigated. 0.4M sol were prepared by using Zinc acetate dehydrate as precursor, monoethanolamine as stabilizer and 2-methoxyethanol as solvent. The thin films were annealed at 200°C, 250°C and 300°C. This annealing process was performed in every layer. Electrical characterization shows the conductivity of the films deposited onto Teflon substrates that annealed at 200°C, 250°C and 300°C were around 0.176, 0.0988, and 0.0952 S cm-1 respectively. On the other hand, for the thin films deposited on glass substrates, these values are 0.187, 0.139 and 0.126 S cm-1 for similar variation in the annealing temperature. The conductivity of the ZnO thin films on glass substrate was higher than those on Teflon substrates. FESEM images confirmed that microstructure of the thin films on both substrate consists of nanoparticles.
Keywords :
II-VI semiconductors; annealing; crystal microstructure; electrical conductivity; field emission electron microscopy; nanofabrication; nanoparticles; scanning electron microscopy; semiconductor growth; semiconductor thin films; sol-gel processing; spin coating; wide band gap semiconductors; zinc compounds; 2-methoxyethanol; FESEM; SiO2; ZnO; electrical characteristics; electrical conductivity; glass substrates; low-temperature annealed spin coated zinc oxide thin films; microstructure; monoethanolamine; nanoparticles; physical characteristics; polytetrafluoroethylene substrates; sol-gel spin coating technique; structural properties; teflon substrates; temperature 200 degC; temperature 250 degC; temperature 300 degC; zinc acetate dehydrate; Annealing; Conductivity; Films; Glass; Substrates; Zinc oxide; Electrical Properties; Sol-gel Spin Coating; Structural Properties; ZnO Thin Films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Humanities, Science and Engineering Research (SHUSER), 2012 IEEE Symposium on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4673-1311-7
Type :
conf
DOI :
10.1109/SHUSER.2012.6268824
Filename :
6268824
Link To Document :
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