DocumentCode
2972249
Title
Planar optical waveguide design for UV-nanoimprinted microring resonator based biosensors
Author
Landgraf, Rene ; Haugwitz, Toni ; Kirchner, Robert ; Finn, Andreas ; Fischer, Wolf-Joachim
Author_Institution
Fraunhofer-Inst. for Photonic Microsyst., Dresden, Germany
fYear
2011
fDate
28-31 Oct. 2011
Firstpage
596
Lastpage
599
Abstract
This paper presents the development and use of novel concise mode diagrams as a fast and useful tool for designing planar optical waveguides. By usage of these mode diagrams, the waveguide geometry and materials can be conveniently chosen. The mode diagrams calculated with the so called Matrix-EIM are particularly useful for the design of straight planar waveguides manufactured by nanoimprinting to choose suitable combinations of polymers, geometries and substrates. The results correspond well to a commercial FEM solver and can be obtained faster. Some examples for UV-nanoimprinted polymers on oxidized standard silicon wafers are shown.
Keywords
biosensors; micromechanical resonators; nanolithography; optical planar waveguides; UV-nanoimprinted microring resonator; biosensors; planar optical waveguide design; waveguide geometry; Couplings; Optical resonators; Optical waveguides; Planar waveguides; Plastics; Transmission line matrix methods;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2011 IEEE
Conference_Location
Limerick
ISSN
1930-0395
Print_ISBN
978-1-4244-9290-9
Type
conf
DOI
10.1109/ICSENS.2011.6127280
Filename
6127280
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