• DocumentCode
    2972249
  • Title

    Planar optical waveguide design for UV-nanoimprinted microring resonator based biosensors

  • Author

    Landgraf, Rene ; Haugwitz, Toni ; Kirchner, Robert ; Finn, Andreas ; Fischer, Wolf-Joachim

  • Author_Institution
    Fraunhofer-Inst. for Photonic Microsyst., Dresden, Germany
  • fYear
    2011
  • fDate
    28-31 Oct. 2011
  • Firstpage
    596
  • Lastpage
    599
  • Abstract
    This paper presents the development and use of novel concise mode diagrams as a fast and useful tool for designing planar optical waveguides. By usage of these mode diagrams, the waveguide geometry and materials can be conveniently chosen. The mode diagrams calculated with the so called Matrix-EIM are particularly useful for the design of straight planar waveguides manufactured by nanoimprinting to choose suitable combinations of polymers, geometries and substrates. The results correspond well to a commercial FEM solver and can be obtained faster. Some examples for UV-nanoimprinted polymers on oxidized standard silicon wafers are shown.
  • Keywords
    biosensors; micromechanical resonators; nanolithography; optical planar waveguides; UV-nanoimprinted microring resonator; biosensors; planar optical waveguide design; waveguide geometry; Couplings; Optical resonators; Optical waveguides; Planar waveguides; Plastics; Transmission line matrix methods;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2011 IEEE
  • Conference_Location
    Limerick
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-9290-9
  • Type

    conf

  • DOI
    10.1109/ICSENS.2011.6127280
  • Filename
    6127280