• DocumentCode
    2972358
  • Title

    Contacts realization by rapid thermal annealing in multicrystalline silicon solar cells with special emphasis on metal influence

  • Author

    El Omari, H. ; Boyeaux, J.P. ; Laugier, A.

  • Author_Institution
    INSA, CNRS, Villeurbanne, France
  • Volume
    2
  • fYear
    1994
  • fDate
    5-9 Dec 1994
  • Firstpage
    1539
  • Abstract
    To improve the quality of solar cell screen printed contacts, the authors have previously shown the capability to sinter the screen printed contacts by rapid thermal annealing (RTA) instead of commercial sintering; they have also noticed that the commonly used TiO2 coating deposited by spray enhances the quality of the contact either with classical annealing or RTA. The aim of the present work is to analyse the metal influence on either front or back contacts realization by RTA on Polix p type multicrystalline silicon subsequently phosphorus diffused. The screen printed contact was replaced by the chosen metal dot obtained by evaporation. The authors have studied: Al/TiO2; Ag/Al/TiO2; Cu/Al/TiO2; Pt/Al/TiO2 and Cu/Cr/TiO2. The RTA treatments were carried out at various temperatures and annealing time in an Ar ambience. The quality of the contacts are analysed from I-V characteristics, and possible diffusions of metallic species are characterized by SIMS experiments
  • Keywords
    electrical contacts; elemental semiconductors; rapid thermal annealing; semiconductor device metallisation; semiconductor device testing; semiconductor-metal boundaries; silicon; solar cells; vapour deposited coatings; vapour deposition; Ag-Al-TiO2; Al-TiO2; Cu-Al-TiO2; Cu-Cr-TiO2; I-V characteristics; Pt-Al-TiO2; Si; TiO2; annealing time; back contacts; evaporation deposition; front contacts; multicrystalline semiconductor; rapid thermal annealing; screen printed contacts; solar cell; temperature; Artificial intelligence; Coatings; Contact resistance; Ink; Passivation; Photovoltaic cells; Printing; Rapid thermal annealing; Silicon; Thermal spraying;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Energy Conversion, 1994., Conference Record of the Twenty Fourth. IEEE Photovoltaic Specialists Conference - 1994, 1994 IEEE First World Conference on
  • Conference_Location
    Waikoloa, HI
  • Print_ISBN
    0-7803-1460-3
  • Type

    conf

  • DOI
    10.1109/WCPEC.1994.520507
  • Filename
    520507