DocumentCode
2972358
Title
Contacts realization by rapid thermal annealing in multicrystalline silicon solar cells with special emphasis on metal influence
Author
El Omari, H. ; Boyeaux, J.P. ; Laugier, A.
Author_Institution
INSA, CNRS, Villeurbanne, France
Volume
2
fYear
1994
fDate
5-9 Dec 1994
Firstpage
1539
Abstract
To improve the quality of solar cell screen printed contacts, the authors have previously shown the capability to sinter the screen printed contacts by rapid thermal annealing (RTA) instead of commercial sintering; they have also noticed that the commonly used TiO2 coating deposited by spray enhances the quality of the contact either with classical annealing or RTA. The aim of the present work is to analyse the metal influence on either front or back contacts realization by RTA on Polix p type multicrystalline silicon subsequently phosphorus diffused. The screen printed contact was replaced by the chosen metal dot obtained by evaporation. The authors have studied: Al/TiO2; Ag/Al/TiO2; Cu/Al/TiO2; Pt/Al/TiO2 and Cu/Cr/TiO2. The RTA treatments were carried out at various temperatures and annealing time in an Ar ambience. The quality of the contacts are analysed from I-V characteristics, and possible diffusions of metallic species are characterized by SIMS experiments
Keywords
electrical contacts; elemental semiconductors; rapid thermal annealing; semiconductor device metallisation; semiconductor device testing; semiconductor-metal boundaries; silicon; solar cells; vapour deposited coatings; vapour deposition; Ag-Al-TiO2; Al-TiO2; Cu-Al-TiO2; Cu-Cr-TiO2; I-V characteristics; Pt-Al-TiO2; Si; TiO2; annealing time; back contacts; evaporation deposition; front contacts; multicrystalline semiconductor; rapid thermal annealing; screen printed contacts; solar cell; temperature; Artificial intelligence; Coatings; Contact resistance; Ink; Passivation; Photovoltaic cells; Printing; Rapid thermal annealing; Silicon; Thermal spraying;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Energy Conversion, 1994., Conference Record of the Twenty Fourth. IEEE Photovoltaic Specialists Conference - 1994, 1994 IEEE First World Conference on
Conference_Location
Waikoloa, HI
Print_ISBN
0-7803-1460-3
Type
conf
DOI
10.1109/WCPEC.1994.520507
Filename
520507
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