DocumentCode :
2972358
Title :
Contacts realization by rapid thermal annealing in multicrystalline silicon solar cells with special emphasis on metal influence
Author :
El Omari, H. ; Boyeaux, J.P. ; Laugier, A.
Author_Institution :
INSA, CNRS, Villeurbanne, France
Volume :
2
fYear :
1994
fDate :
5-9 Dec 1994
Firstpage :
1539
Abstract :
To improve the quality of solar cell screen printed contacts, the authors have previously shown the capability to sinter the screen printed contacts by rapid thermal annealing (RTA) instead of commercial sintering; they have also noticed that the commonly used TiO2 coating deposited by spray enhances the quality of the contact either with classical annealing or RTA. The aim of the present work is to analyse the metal influence on either front or back contacts realization by RTA on Polix p type multicrystalline silicon subsequently phosphorus diffused. The screen printed contact was replaced by the chosen metal dot obtained by evaporation. The authors have studied: Al/TiO2; Ag/Al/TiO2; Cu/Al/TiO2; Pt/Al/TiO2 and Cu/Cr/TiO2. The RTA treatments were carried out at various temperatures and annealing time in an Ar ambience. The quality of the contacts are analysed from I-V characteristics, and possible diffusions of metallic species are characterized by SIMS experiments
Keywords :
electrical contacts; elemental semiconductors; rapid thermal annealing; semiconductor device metallisation; semiconductor device testing; semiconductor-metal boundaries; silicon; solar cells; vapour deposited coatings; vapour deposition; Ag-Al-TiO2; Al-TiO2; Cu-Al-TiO2; Cu-Cr-TiO2; I-V characteristics; Pt-Al-TiO2; Si; TiO2; annealing time; back contacts; evaporation deposition; front contacts; multicrystalline semiconductor; rapid thermal annealing; screen printed contacts; solar cell; temperature; Artificial intelligence; Coatings; Contact resistance; Ink; Passivation; Photovoltaic cells; Printing; Rapid thermal annealing; Silicon; Thermal spraying;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photovoltaic Energy Conversion, 1994., Conference Record of the Twenty Fourth. IEEE Photovoltaic Specialists Conference - 1994, 1994 IEEE First World Conference on
Conference_Location :
Waikoloa, HI
Print_ISBN :
0-7803-1460-3
Type :
conf
DOI :
10.1109/WCPEC.1994.520507
Filename :
520507
Link To Document :
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