Broadband Transitions for Micro-machined Waveguides

When chemically micromachining silicon wafers by wet etching, the naturally occurring shapes are trapezoidal or hexagonal instead of rectangular. Practical applications require interfacing these common crossections with standard rectangular waveguides; therefore, efficient transitions with broadband characteristics are necessary for enhancing reliability, simplicity, and cost-effectiveness. This paper presents a straightforward design approach and measurements for convenient broadband transitions. The uses of such interfaces improve compatibility with existing precision waveguide measurement capabilities and facilitate the realization of broadband transitions.