Title :
Design and realization for high dynamic silicon micromachined gyroscope
Author :
Zhang, W. ; Yan, Q.W. ; Zhang, F.X.
Author_Institution :
Res. Centre of Sensor Technol., Beijing Inf. Sci. & Technol. Univ., Beijing, China
Abstract :
This paper reports a design and realization method for the high dynamic silicon micromachined gyroscope. The gyroscope is used in control technology field to measure pose of a rotating carrier with high self-rolling velocity up to 14400deg/s. The roll angular velocity, the yawing and pitching angle velocity of the rotating carrier are sensed and outputted by the gyroscope, and the output signal of the gyroscope can be obtained by the signal processing technology which is consisted of hardware circuits, software arithmetic and compensation technique.
Keywords :
compensation; digital signal processing chips; gyroscopes; micromachining; microsensors; silicon; DSP technology; MEMS processing technology; Si; compensation technique; control technology field; gyroscope output signal; hardware circuits; high dynamic silicon micromachined gyroscope design; pitching angle velocity; roll angular velocity; rotating carrier; self-rolling velocity; signal processing technology; software arithmetic technique; yawing; Angular velocity; Circuits; Design methodology; Gyroscopes; Hardware; Rotation measurement; Signal processing; Silicon; Velocity control; Velocity measurement; high dynamic; sensor; signal processing; silicon micromachined gyroscope;
Conference_Titel :
Information and Automation, 2009. ICIA '09. International Conference on
Conference_Location :
Zhuhai, Macau
Print_ISBN :
978-1-4244-3607-1
Electronic_ISBN :
978-1-4244-3608-8
DOI :
10.1109/ICINFA.2009.5205116
