• DocumentCode
    2974860
  • Title

    High-Q BAW Resonator on Pt/Ta2O5/SiO2-based Reflector Stack

  • Author

    Lobeek, Jan-Willem ; Strijbos, Remco ; Jansman, Andre ; Li, Nancy Xin ; Smolders, A. Bart ; Pulsford, N.

  • Author_Institution
    NXP Semicond., Nijmegen
  • fYear
    2007
  • fDate
    3-8 June 2007
  • Firstpage
    2047
  • Lastpage
    2050
  • Abstract
    This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.
  • Keywords
    Q-factor; acoustic resonators; bulk acoustic wave devices; platinum compounds; silicon compounds; tantalum compounds; Pt-Ta2O5-SiO2; Pt-Ta2O5-SiO2-based reflector stack; bulk-acoustic-wave device; high-Q BAW resonator; Acoustic devices; Acoustic materials; Acoustic measurements; Acoustic waves; Biomembranes; Boundary conditions; Dielectric materials; Impedance; Q factor; Substrates; Bulk-Acoustic-Wave (BAW) Devices; Front-End-Module; Passive Integration; SBAR;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium, 2007. IEEE/MTT-S International
  • Conference_Location
    Honolulu, HI
  • ISSN
    0149-645X
  • Print_ISBN
    1-4244-0688-9
  • Electronic_ISBN
    0149-645X
  • Type

    conf

  • DOI
    10.1109/MWSYM.2007.380253
  • Filename
    4264270
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2974860