DocumentCode :
2974860
Title :
High-Q BAW Resonator on Pt/Ta2O5/SiO2-based Reflector Stack
Author :
Lobeek, Jan-Willem ; Strijbos, Remco ; Jansman, Andre ; Li, Nancy Xin ; Smolders, A. Bart ; Pulsford, N.
Author_Institution :
NXP Semicond., Nijmegen
fYear :
2007
fDate :
3-8 June 2007
Firstpage :
2047
Lastpage :
2050
Abstract :
This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.
Keywords :
Q-factor; acoustic resonators; bulk acoustic wave devices; platinum compounds; silicon compounds; tantalum compounds; Pt-Ta2O5-SiO2; Pt-Ta2O5-SiO2-based reflector stack; bulk-acoustic-wave device; high-Q BAW resonator; Acoustic devices; Acoustic materials; Acoustic measurements; Acoustic waves; Biomembranes; Boundary conditions; Dielectric materials; Impedance; Q factor; Substrates; Bulk-Acoustic-Wave (BAW) Devices; Front-End-Module; Passive Integration; SBAR;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Symposium, 2007. IEEE/MTT-S International
Conference_Location :
Honolulu, HI
ISSN :
0149-645X
Print_ISBN :
1-4244-0688-9
Electronic_ISBN :
0149-645X
Type :
conf
DOI :
10.1109/MWSYM.2007.380253
Filename :
4264270
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2974860
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