Title :
Performance of Coplanar Waveguides on Surface Passivated Highly Resistive Silicon Covered by Ferroelectric Thin Film
Author :
Kuylenstierna, Dan ; Norling, Martin ; Vorobiev, Andrei ; Reimann, Klaus ; Lederer, Dimitri ; Raskin, Jean-Pierre ; Gevorgian, Spartak
Author_Institution :
Chalmers Univ. of Technol., Goteborg
Abstract :
Coplanar waveguides (CPWs) on surface passivated highly resistive Si (HRS) covered by ferroelectric film are studied. The focus is on passivation techniques reducing losses caused by surface charge accumulation at the Si/SiO2 interface. Different passivation methods are considered, Ar-ion bombardment into the silicon substrate and deposition of poly-Si below the oxide layer. Both methods remove any bias-dependence and decrease the losses associated with surface charge accumulation. It is also concluded that the effect of passivation remains after pulsed laser deposition of a ferroelectric thin film.
Keywords :
coplanar waveguides; ferroelectric thin films; silicon; coplanar waveguides; ferroelectric thin film; pulsed laser deposition; silicon; surface charge accumulation; Coplanar waveguides; Ferroelectric films; Ferroelectric materials; Optical pulses; Passivation; Pulsed laser deposition; Semiconductor thin films; Silicon; Substrates; Surface waves; Ferroelectric; coplanar waveguide; highly resistive silicon; surface charge accumulation; surface passivation;
Conference_Titel :
Microwave Symposium, 2007. IEEE/MTT-S International
Conference_Location :
Honolulu, HI
Print_ISBN :
1-4244-0688-9
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2007.380255