Interferometric Measurements of Dispersion Curves and Transmission Characteristics of the Acoustic Mirror in Thin Film BAW Resonator

Author

Kokkonen, Kimmo ; Pensala, Tuomas ; Kaivola, Matti

Author_Institution

Helsinki Univ. of Technol., Helsinki

fYear

2007

fDate

3-8 June 2007

Firstpage

2071

Lastpage

2074

Abstract

A heterodyne laser interferometer is used for a detailed study of acoustic wave fields excited in a 932 MHz ZnO solidly mounted BAW resonator. The sample is manufactured onto a glass substrate, which allows for direct measurement of the vibration fields from the bottom of the mirror stack. The vibration fields are measured both on top of the resonator and at the bottom of the mirror stack. Dispersion curves are calculated from the experimental data in both cases. This enables comparison between the vibration amplitudes on top of the resonator with those at the bottom of the mirror stack, and hence allows to determine the transmission characteristics of the acoustic mirror within the measured wave-vector, frequency space. The experimental dispersion curves and mirror transmission are compared with simulations.

Keywords

II-VI semiconductors; acoustic resonators; acoustic wave transmission; bulk acoustic wave devices; measurement by laser beam; semiconductor thin films; thin film devices; vibration measurement; wide band gap semiconductors; zinc compounds; ZnO; acoustic mirror stack; acoustic wave fields; bulk acoustic wave resonator; dispersion curves; frequency 932 MHz; frequency space; glass substrate; heterodyne laser interferometer; interferometric measurements; thin film BAW resonator; transmission curves; vibration amplitudes; vibration fields; wave vector; Acoustic measurements; Acoustic waves; Dispersion; Glass manufacturing; Laser excitation; Mirrors; Solid lasers; Transistors; Vibration measurement; Zinc oxide; Bulk acoustic waves; solidly mounted resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium, 2007. IEEE/MTT-S International

Conference_Location

Honolulu, HI

ISSN

0149-645X

Print_ISBN

1-4244-0688-9

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2007.380294

Filename

4264276