Low Cost Method for Localized Packaging of Temperature Sensitive Capacitive RF MEMS Switches in Liquid Crystal Polymer

This work demonstrates a low cost localized heating packaging method on liquid crystal polymer (LCP) for temperature sensitive devices such as the capacitive RF MEMS switch. Simulations of the heating element structures are performed to examine the thermal characteristics of the bonded regions and switch. Heating lines are fabricated on LCP using the copper cladding, requiring only one photolithography and etch step. The MEMS cavity is formed with two 1 mil layers of low-temp LCP that are etched with a CO₂ laser system. The layers are bonded with localized-heating by passing 7 A of DC current through the heating element while compressing the 4 layers together. The bonded switch is submerged in 60degC water for 24 hours to test seal quality. Before and after measurements are shown, providing evidence of a successful bond.