Title :
Electrostatic MEMS emulsifying device with high flow rate
Author :
Jeong, Jinwoo ; Chun, Kukjin
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea
Abstract :
Electrostatically actuated MEMS emulsifying device with high flow rate has been proposed in this paper. In order to increase flow rate, electrostatic actuation across working fluid is adopted. Also large number of nozzle array is used for active droplet injection. Design of emulsifying device is optimized using FEM simulation for flow rate of 12.5 mL/min. The proposed device is fabricated and packaged. Total size of MEMS emulsifying device is 21.6 mm × 21.6 mm × 1.2mm.
Keywords :
electrostatic actuators; micromechanical devices; nozzles; active droplet injection; electrostatic MEMS emulsifying device; electrostatic actuation; high flow rate; nozzle array; Electrodes; Electrostatics; Fluids; Force; Fuels; Micromechanical devices; Valves;
Conference_Titel :
Sensors, 2011 IEEE
Conference_Location :
Limerick
Print_ISBN :
978-1-4244-9290-9
DOI :
10.1109/ICSENS.2011.6127418
