Title :
Sub-micron thin films of lithium niobate single crystals prepared by crystal ion slicing and wafer bonding
Author :
Rabiei, Payam ; Gunter, Peter
Author_Institution :
Inst. of Quantum Electron., Swiss Fed. Inst. of Technol., Zurich
Abstract :
Sub-micron thin films of single crystal lithium niobate are prepared by ion implantation and wafer bonding. The thin film exhibit high crystalline quality and have identical optical and electro-optical properties to bulk single crystals
Keywords :
electro-optical modulation; ion implantation; lithium compounds; optical fabrication; optical films; optical materials; thin films; wafer bonding; LiNbO3; crystal ion slicing; electro-optical properties; ion implantation; lithium niobate; sub-micron thin films; wafer bonding; Crystallization; Lithium niobate; Nonlinear optics; Optical films; Photonic crystals; Rough surfaces; Surface morphology; Surface roughness; Transistors; Wafer bonding;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.201737
