DocumentCode
2975864
Title
Influence of thin conducting layer on leaky SH-SAW in piezoelectric crystal
Author
Zaitsev, Boris D. ; Kuznetsova, Iren E. ; Teplykh, Andrei A.
Author_Institution
Inst. of Radio Eng. & Electron., Acad. of Sci., Saratov, Russia
Volume
2
fYear
2004
fDate
23-27 Aug. 2004
Firstpage
1569
Abstract
The influence of a thin conducting layer on the characteristics of a leaky SAW propagating in a piezoelectric crystal (resisto-acoustic effect) was first theoretically and experimentally investigated. We studied the wave with shear-horizontal polarization (SH-SAW) in 36Y-X lithium niobate. As a result, the anomalous resisto-acoustic effect predicted previously for weakly inhomogeneous SAWs was revealed experimentally for the first time. The investigation showed that this effect is very sensitive to the real state of the crystal surface, which is defined by mechanical and chemical treatment of the sample. An assumption about the existence of a thin nonpiezoelectric layer with a disturbed structure on the crystal surface allowed good agreement to be reached between theoretical and experimental results.
Keywords
interdigital transducers; piezoelectric materials; piezoelectricity; surface acoustic waves; thin films; IDT; LiNbO3; anomalous resisto-acoustic effect; leaky SAW; lithium niobate; piezoelectric crystal; shear-horizontal polarization SAW; thin conducting layer; weakly inhomogeneous SAW; Acoustic propagation; Acoustic sensors; Acoustic waves; Attenuation; Chemicals; Lithium niobate; Piezoelectric polarization; Sensor phenomena and characterization; Surface acoustic waves; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2004 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-8412-1
Type
conf
DOI
10.1109/ULTSYM.2004.1418104
Filename
1418104
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