Title :
Influence of thin conducting layer on leaky SH-SAW in piezoelectric crystal
Author :
Zaitsev, Boris D. ; Kuznetsova, Iren E. ; Teplykh, Andrei A.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Saratov, Russia
Abstract :
The influence of a thin conducting layer on the characteristics of a leaky SAW propagating in a piezoelectric crystal (resisto-acoustic effect) was first theoretically and experimentally investigated. We studied the wave with shear-horizontal polarization (SH-SAW) in 36Y-X lithium niobate. As a result, the anomalous resisto-acoustic effect predicted previously for weakly inhomogeneous SAWs was revealed experimentally for the first time. The investigation showed that this effect is very sensitive to the real state of the crystal surface, which is defined by mechanical and chemical treatment of the sample. An assumption about the existence of a thin nonpiezoelectric layer with a disturbed structure on the crystal surface allowed good agreement to be reached between theoretical and experimental results.
Keywords :
interdigital transducers; piezoelectric materials; piezoelectricity; surface acoustic waves; thin films; IDT; LiNbO3; anomalous resisto-acoustic effect; leaky SAW; lithium niobate; piezoelectric crystal; shear-horizontal polarization SAW; thin conducting layer; weakly inhomogeneous SAW; Acoustic propagation; Acoustic sensors; Acoustic waves; Attenuation; Chemicals; Lithium niobate; Piezoelectric polarization; Sensor phenomena and characterization; Surface acoustic waves; Surface treatment;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1418104