Title :
P+ Polysilkm Emitters for Sub-O.5/spl mu/m High-Performance PNP
Author :
Warnock, J. ; Sun, J.Y.C. ; Bhattacharya, Surya
Author_Institution :
IBM Research Division, T.J. Watson Research Cneter
Keywords :
BiCMOS integrated circuits; Cutoff frequency; Degradation; Design optimization; Dielectrics; Etching; Furnaces; Implants; Rapid thermal annealing; Thickness measurement;
Conference_Titel :
Device Research Conference, 1992. Digest. 50th Annual
Conference_Location :
Cambridge, MA, USA
DOI :
10.1109/DRC.1992.671852
