Title :
Monolithic Ceramic Technology for Sensing Devices
Author :
Ramos, Francisco M. ; López-Gándara, Carlos ; Cirera, Albert ; Morante, Joan R.
Author_Institution :
L´´Hospitalet de Llobregat, Llobregat
Abstract :
We present a multilayer co-fired ceramic technology for the development of alumina-based gas sensors substrates. These substrates include embedded heater and thermo-resistance as well as electrodes in a 2times2 mm dice. Substrate thickness is less than 0.2 mm. The substrate technology allows obtaining smooth surface at the nanometer scale. As an example of application, we have studied the growth of nanowires on the presented structure to take advantage of nanoscale phenomena.
Keywords :
alumina; ceramics; electrodes; gas sensors; micromechanical devices; nanowires; substrates; alumina-based gas sensors substrate; electrode; embedded heater; monolithic ceramic technology; multilayer cofired ceramic technology; nanometer scale; nanoscale phenomena; nanowire; sensing device; substrate thickness; thermo-resistance; Ceramics; Costs; Electrodes; Energy consumption; Gas detectors; Nanowires; Nonhomogeneous media; Shape; Silicon; Temperature sensors;
Conference_Titel :
Electron Devices, 2009. CDE 2009. Spanish Conference on
Conference_Location :
Santiago de Compostela
Print_ISBN :
978-1-4244-2838-0
Electronic_ISBN :
978-1-4244-2839-7
DOI :
10.1109/SCED.2009.4800489
