Title :
Simulation of CMOS compatible RF MEMS varactors
Author :
Lakshmi, S. ; Rao, Smitha
Author_Institution :
Dept. of E&C, M.S.Ramaiah Inst. of Technol., Bangalore, India
Abstract :
This paper proposes the design, simulation and analysis of RF MEMS varactor for VCO applications for microwave frequencies. The varactors are parallel plate capacitors using electrostatic actuation for tuning. The designed varactors have been simulated using Coventorware and optimized in terms of dimensions to suit CMOS voltages. The varactors have been analyzed for the influence of plate thickness, folded suspension flexures thickness on pull-in voltage and tuning range.
Keywords :
CMOS analogue integrated circuits; electrostatic actuators; micromechanical devices; varactors; voltage-controlled oscillators; CMOS compatible RF MEMS varactor simulation; Coventorware; VCO; electrostatic actuation; folded suspension flexures thickness; microwave frequency; parallel plate capacitors; plate thickness; Gold; Micromechanical devices; Radio frequency; Resonant frequency; Switches; Tuning; Varactors; CMOS voltage compatibility; Q factor; RF MEMS Varactors; Tuning Range;
Conference_Titel :
Circuits, Controls and Communications (CCUBE), 2013 International conference on
Conference_Location :
Bengaluru
Print_ISBN :
978-1-4799-1599-6
DOI :
10.1109/CCUBE.2013.6718576
