Title :
Single-use microvalve fabricated using Printed Circuit Board and SU8 technologies
Author :
Aracil, Carmen ; Moreno, J. Miguel ; Quero, José M.
Author_Institution :
Univ. of Seville, Seville
Abstract :
A simple and innovative single-use valve based on PCB-MEMS is presented. The power of this valve lies on its activation process and the combination of different technologies to achieve low cost. The activation is a merge of thermal and mechanical phenomena. Other important innovation is the deposition of SU8 over an orifice. This single-use valve has a chamber to include biochemical substances in case the application is of biomedical nature. The integration with other microfluidic and electronic devices has been considered in the design.
Keywords :
microvalves; printed circuits; PCB-MEMS; SU8 technologies; biochemical substances; biomedical nature; electronic devices; mechanical phenomena; microfluidic devices; printed circuit board; single-use microvalve; thermal phenomena; Biomembranes; Chemical technology; Costs; Microfluidics; Microvalves; Orifices; Printed circuits; Resists; Technological innovation; Valves;
Conference_Titel :
Electron Devices, 2009. CDE 2009. Spanish Conference on
Conference_Location :
Santiago de Compostela
Print_ISBN :
978-1-4244-2838-0
Electronic_ISBN :
978-1-4244-2839-7
DOI :
10.1109/SCED.2009.4800500
