Title : 
Towards Nano-Fin based Mercury-Sensors
         
        
            Author : 
Keller, Lars O. ; Kallis, Klaus T. ; Fieder, Horst L. ; Knoch, Joachim
         
        
            Author_Institution : 
Fac. of Electr. Eng., Tech. Univ. Dortmund, Dortmund
         
        
        
        
        
        
            Abstract : 
With the here presented sensor-concept it is possible to produce a low-cost mercury-sensor, based on a lithography-independent structured poly-silicon nanometer-scale fin. Using the increase of electrical resistance of a gold-layer being exposed to mercury-vapor, the exposition to mercury resulting in the amalgamation of the gold-layer can be detected. Giving the ability of regeneration to the here presented sensor, the mercury must be driven out of the gold-layer which can be achieved by heating-up the layer to a temperature over 150degC. Shrinking the sensor to nanometer-dimensions gives the benefit of a small mass of gold, small dimensions of the sensor resulting in a good surface-area-to-volume-ratio (SAVR) and low-power consumption during regeneration-cycle.
         
        
            Keywords : 
chemical sensors; nanosensors; gold layer electrical resistance; lithography-independent structure; low-cost mercury-sensor; low-power consumption; nanofin based mercury-sensors; polysilicon nanometer-scale fin; surface-area-to-volume-ratio; Anisotropic magnetoresistance; Chemical analysis; Chemical sensors; Electric resistance; Etching; Gold; Lithography; Plasma applications; Plasma temperature; Temperature sensors;
         
        
        
        
            Conference_Titel : 
Electron Devices, 2009. CDE 2009. Spanish Conference on
         
        
            Conference_Location : 
Santiago de Compostela
         
        
            Print_ISBN : 
978-1-4244-2838-0
         
        
            Electronic_ISBN : 
978-1-4244-2839-7
         
        
        
            DOI : 
10.1109/SCED.2009.4800502