Ion temperatures in inductively coupled plasmas

Summary form only given, as follows. Atomic chlorine and argon ion temperatures have been measured in inductively coupled plasmas using laser induced fluorescence. Argon ion temperatures were determined by exciting the 3d/sup 4/F/sub 7/2/-4p/sup 4/P/sub 5/2//sup 0/ metastable ion transition at 811.2 nm and monitoring the fluorescence of the 4p/sup 4/P/sub 5/2//sup 0/-3d/sup 1/D/sub 7/2/ transition at 440.1 nm. Chlorine ion temperatures were determined by exciting the /sup 4/S/sup 0/4p/sup 5/P/sub 3/-3d/sup 5/D/sub 4//sup 0/ metastable ion transition at 542.3 nm and monitoring the fluorescence of the /sup 4/S/sup 0/4p/sup 5/P/sub 3/-4s/sup 5/S/sub 2//sup 0/ transition at 479.5 nm. Cl/sup +/ temperatures were measured in both pure chlorine and argon/chlorine mixtures while the Ar/sup +/ temperatures were measured in pure argon discharges. In the center of the plasma, the Ar/sup +/ temperature was between 550 and 1000 K for plasma powers between 30 and 240 W and pressures between 4 and 50 mTorr. Over this same operational parameter space, the Cl/sup +/ temperature was between 2100 and 4500 K. At the edge of the plasma, the Ar/sup +/ temperature increased to between 3000 and 9000 K. Ar/sup +/ drift velocity in the radial direction was between 1/spl times/10/sup 5/ and 2/spl times/10/sup 5/ cm/s at the edge of the plasma. Ion temperatures as a function of plasma power, pressure, argon/chlorine ratio and spatial location will be presented.