Interfacing a fluid code (Induct95) with a particle code (PDP1) to obtain ion energy distributions in inductive and capacitive discharges

Summary form only given, as follows. Our goal is to obtain the ion angular and energy distributions at the wafer of inductive and capacitive discharges. To do this on a standard uniform mesh with particle codes alone would be impractical because of the long time scale nature of the problem (i.e., 10/sup 6/ time steps). A solution is to use a fluid code to simulate the bulk source region, while using a particle-in-cell code to simulate the sheath region. Induct95 is a 2d fluid code which call simulate inductive and capacitive discharges. Though it does not resolve the sheath region near the wafer, it provides diagnostics for the collisional bulk plasma (i.e., potentials, temperatures, fluxes, etc.) Also, fluid codes converge to equilibrium much faster than particle codes in collisional regimes. PDP1 is a 1d3v particle-in-cell code which can simulate rf discharges. It can resolve the sheath region and obtain the ion angular and energy distributions at the wafer target. The overall running time is expected to be that of the fluid code.