Title :
Ultrahigh resolution DC magnetic field measurements using microfabricated fluxgate sensor chips
Author :
Liakopoulos, T.M. ; Ming Xu ; Chong Ahn
Author_Institution :
Center for Microelectron. Sensors, Cincinnati Univ., OH, USA
Abstract :
In this work an innovative fluxgate magnetic sensor chip has been fabricated and successfully tested. This sensor has a wide operation range and ultrahigh sensitivity of 1400 VT/sup -1/. Wide range frequency drive can be used and the linearity of the output signal is demonstrated for (-120 /spl mu/Telsa)-(+120 /spl mu/Telsa) field range.
Keywords :
coils; fluxgate magnetometers; magnetic field measurement; magnetic sensors; micromachining; microsensors; ultraviolet lithography; -120 to 120 muT; 3D micromachined coils; CMOS readout; DC magnetic field measurements; LIGA-like UV lithography; fluxgate magnetic sensor chip; microfabricated fluxgate sensor chips; output signal linearity; ultrahigh resolution; ultrahigh sensitivity; wide operation range; wide range frequency drive; Coils; Conductors; Fabrication; Frequency; Magnetic cores; Magnetic field measurement; Magnetic sensors; Semiconductor device measurement; Sensor systems; Testing;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5018-9
DOI :
10.1109/CPEM.1998.700124
