Title :
Highly Strained InGaAs Quantum Well with GaAs Strain Compensating Layer on InGaAs Ternary Substrate for 1.3 μm Laser
Author :
Arai, Masakazu ; Kinoshita, Kyoichi ; Yoda, Shinichi ; Kondo, Yuta
Author_Institution :
NTT Corp., Atsugi
Abstract :
We have developed highly strained InGaAs quantum wells (QWs) with a 1.3 μm-band emission on a low indium content InGaAs ternary substrate using low temperature metal-organic vapor phase epitaxy (MOVPE). The indium content of the substrate is 0.1, and this has the advantage of providing good thermal conductivity and good crystal quality. In this study, we newly introduced a binary GaAs barrier layer for strain compensation. We performed photoluminescence (PL) and transmission electron microscope (TEM) measurements to confirm that the crystal quality had improved. We realized a broad area laser with GaAs strain compensation that achieved low threshold current operation.
Keywords :
III-V semiconductors; MOCVD; gallium arsenide; indium compounds; optical materials; photoluminescence; quantum well lasers; semiconductor growth; thermal conductivity; transmission electron microscopy; vapour phase epitaxial growth; InGaAs-GaAs; MOVPE; TEM; binary barrier layer; crystal quality; highly-strained quantum well laser; low-temperature metal-organic vapor phase epitaxy; low-threshold current operation; photoluminescence; strain compensating layer; ternary substrate; thermal conductivity; transmission electron microscope; wavelength 1.3 μm; Capacitive sensors; Epitaxial growth; Epitaxial layers; Gallium arsenide; Indium gallium arsenide; Performance evaluation; Quantum well lasers; Substrates; Temperature; Thermal conductivity;
Conference_Titel :
Indium Phosphide & Related Materials, 2007. IPRM '07. IEEE 19th International Conference on
Conference_Location :
Matsue
Print_ISBN :
1-4244-0874-1
Electronic_ISBN :
1092-8669
DOI :
10.1109/ICIPRM.2007.381168