Title :
Fabrication of Double Channel Recessed Laterally Coupled Surface Metal Grating DFB LD Using Holographic Lithography
Author :
Jang, S.J. ; Lee, Y.T.
Author_Institution :
Gwangju Inst. of Sci. & Technol., Gwangju
Abstract :
Laterally coupled surface metal grating DFB LD was fabricated using holographic lithography. The device shows single longitudinal mode operation, with a threshold current of 25 mA and 28 dB side mode suppression ratio.
Keywords :
distributed feedback lasers; holography; lithography; DFB LD; current 25 mA; distributed feedback laser; holographic lithography; laser fabrication; laterally coupled surface metal grating; Chromium; Costs; Etching; Gratings; Holography; Indium phosphide; Lithography; Optical device fabrication; Optical surface waves; Substrates;
Conference_Titel :
Indium Phosphide & Related Materials, 2007. IPRM '07. IEEE 19th International Conference on
Conference_Location :
Matsue
Print_ISBN :
1-4244-0875-X
Electronic_ISBN :
1092-8669
DOI :
10.1109/ICIPRM.2007.381170
