A 13.56 MHz current-output-type inverter utilizing an immittance conversion element

High frequency plasma processing techniques are utilized in the field of industrial manufacturing. High frequency plasma generators are traditionally composed of analog amplifiers, although their conversion efficiencies are limited up to 50 %. A current-output-type inverter, composed of an immittance conversion element, that enables constant current injections to the loads and megahertz plasma discharging with high conversion efficiency. A novel resonant gate driver is also proposed to achieve not only 10 MHz range operation, but a low driving power. Design and analysis of the proposed inverter was carried out, resulting in an increasing of efficiency up to 72.7 % at 13 MHz.