Title :
40 Gbps Electroabsorption Modulated DFB Laser with Tilted Facet Formed by Dry Etching
Author :
Choe, Joong-Seon ; Kwon, Yong-Hwan ; Sim, Jae-Sik ; Kim, Sung-Bok ; Lee, Myung-Hyun
Author_Institution :
Electron. & Telecommun. Res. Inst., Daejeon
Abstract :
We fabricated electroabsorption modulated distributed feedback (DFB) laser diodes for 40 Gbps application through selective-area growth method. The facet reflection was not sufficiently removed by just depositing anti-reflection coating on the as-cleaved facet and low frequency resonance occurred by optical feedback from facet to DFB laser. Tilted facet formed by dry etching processes successfully reduced the optical feedback and the resonance in E/O response decreased to as small as 2.8 dB.
Keywords :
antireflection coatings; distributed feedback lasers; electro-optical modulation; electroabsorption; etching; laser feedback; semiconductor lasers; antireflection coating; bit rate 40 Gbit/s; distributed feedback laser diodes; dry etching; electro absorption modulated DFB laser; optical feedback; selective-area growth method; tilted facet reflection; Chirp modulation; Dry etching; Fiber lasers; Laser feedback; Optical buffering; Optical coupling; Optical feedback; Optical modulation; Optical waveguides; Waveguide lasers;
Conference_Titel :
Indium Phosphide & Related Materials, 2007. IPRM '07. IEEE 19th International Conference on
Conference_Location :
Matsue
Print_ISBN :
1-4244-0875-X
Electronic_ISBN :
1092-8669
DOI :
10.1109/ICIPRM.2007.381175