Monte-Carlo method in AFM calibration

Surface measurements made using atomic force microscopy are one of the most important fields in quality control for the semiconductor industry. Uncertainty is typically estimated using complicated model functions and Monte-Carlo method appears very interesting for making these calculations easily and non-assuming the linearity of the functions. This procedure was checked by the calibration of transfer standards in lateral and vertical directions. Results show its capability for the calculation and are in agreement with the Central Limit Theorem for trials over 10.000.