Title :
Present State and Future Tasks of III-V Bulk Crystal Growth
Author_Institution :
Inst. for Crystal Growth, Berlin
Abstract :
Semiconductor III-V compounds are now and in future of central importance for human life. The leading position of GaAs will be continuously developed further. Single crystalline yield of InP needs to increase essentially. Very high growth rates are expected for GaSb, GaN and A1N. Accordingly, the mastering of the melt-solid, vapour-solid and flux-solid phase transitions on higher technological level by more detailed fundamental knowledge is absolutely essential. VGF growth method is of raising relevance for 4-6(8)-inch GaAs, InP and GaSb crystals. Cost reduction, convection and stoichiometry control, exemption from boron, in situ prevention of precipitate generation, inclusion trapping, dislocation density and patterning as well as twinning are the main tasks of defect engineering.
Keywords :
III-V semiconductors; aluminium compounds; crystal growth; dislocation density; gallium arsenide; gallium compounds; AlN; GaAs; GaN; GaSb; III-V bulk crystal growth; InP; VGF growth method; defect engineering; dislocation density; dislocation patterning; flux-solid phase transition; inclusion trapping; melt-solid phase transition; precipitate generation; semiconductor III-V compounds; stoichiometry control; vapour-solid transition; Boron; Crystalline materials; Crystallization; Crystals; Gallium arsenide; Gallium nitride; III-V semiconductor materials; Indium phosphide; Production; Temperature control;
Conference_Titel :
Indium Phosphide & Related Materials, 2007. IPRM '07. IEEE 19th International Conference on
Conference_Location :
Matsue
Print_ISBN :
1-4244-0875-X
Electronic_ISBN :
1092-8669
DOI :
10.1109/ICIPRM.2007.381191