Title :
Emitter layer design for high-speed InP HBTs with high reliability
Author :
Kashio, Norihide ; Kurishima, Kenji ; Fukai, Yoshino K. ; Yamahata, Shoji ; Miyamoto, Yasuyuki
Author_Institution :
NTT Corp., Kanagawa
Abstract :
We investigated the influence of emitter doping level on the performance for high-speed InP HBTs with high reliability. The HBTs show high current gain and excellent reliability characteristics under stress current density of 5 mA/mum2.
Keywords :
heterojunction bipolar transistors; indium compounds; semiconductor device reliability; HBT reliability characteristics; InP; emitter doping level; emitter layer design; heterojunction bipolar transistor; stress current density; Conference proceedings; Current density; Doping; Indium phosphide; Materials reliability; Molecular beam epitaxial growth; Parasitic capacitance; Stress; Temperature; Testing;
Conference_Titel :
Indium Phosphide & Related Materials, 2007. IPRM '07. IEEE 19th International Conference on
Conference_Location :
Matsue
Print_ISBN :
1-4244-0875-X
Electronic_ISBN :
1092-8669
DOI :
10.1109/ICIPRM.2007.381219