• DocumentCode
    2979053
  • Title

    Particle-in-cell simulation of plasma surface wave sustained discharges

  • Author

    Cooperberg, D.J. ; Birdsall, C.K.

  • Author_Institution
    Electron. Res. Lab., California Univ., Berkeley, CA, USA
  • fYear
    1996
  • fDate
    3-5 June 1996
  • Firstpage
    162
  • Abstract
    Summary form only given, as follows. Surface waves in a warm, unmagnetized, metal bounded plasma have been investigated via electrostatic 2 1/2 d particle simulation. Our study focuses on a slab configuration in which the y direction is periodic and the x direction is bounded by grounded, absorbing conducting walls. Our prior simulation has produced dispersion relations and eigenfunctions for surface waves analogous to the Gould-Trivelpiece waves in cylindrical systems for which the k/sub y/=0 cut-off of the asymmetric mode defines the series resonance and secondary branches whose cutoffs represent Tonks-Dattner resonances. The current work demonstrates progress made in studying, low voltage, argon discharges. 1d simulations sustain discharges at the series resonance where the plasma behaves as a resistive load. In 2d, plasmas have been sustained by exciting large amplitude standing plasma surface waves. Surface wave sustained plasmas have been studied extensively by Moisan et al. In cylindrical devices bound by dielectrics. This work extends such studies to metal bounded planar configurations which may be more suitable for large area plasma processing.
  • Keywords
    plasma simulation; 1d simulations; Gould-Trivelpiece waves; Tonks-Dattner resonances; asymmetric mode; cylindrical devices; cylindrical systems; dielectrics; dispersion relations; eigenfunctions; electrostatic 2 1/2 d particle simulation; grounded absorbing conducting walls; large area plasma processing; low voltage Ar discharges; metal bounded planar configurations; particle-in-cell simulation; plasma surface wave sustained discharges; slab configuration; warm unmagnetized metal bounded plasma; Dispersion; Electrostatics; Plasma devices; Plasma materials processing; Plasma simulation; Plasma waves; Resonance; Slabs; Surface discharges; Surface waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1996. IEEE Conference Record - Abstracts., 1996 IEEE International Conference on
  • Conference_Location
    Boston, MA, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-3322-5
  • Type

    conf

  • DOI
    10.1109/PLASMA.1996.550699
  • Filename
    550699