Title :
Development of miniature hydrophone with PZT film deposited by hydrothermal method
Author :
Kitsunai, Hiroshi ; Suzuki, Takahiro ; Ishikawa, Mutsuo ; Kawashima, Norimichi ; Ohdaira, Etsuzo ; Kurosawa, Minorui ; Takeuchi, Shinichi
Author_Institution :
Fac. of Eng., Toin Univ. of Yokohama, Japan
Abstract :
A needle type miniature hydrophone was developed by hydrothermally depositing PZT poly-crystal film with thickness of about 10 μm on an end of a titanium wire with diameter of 0.3 mm in this study. It is desirable that hydrophone should have as small shape as possible in order to avoid disturbance in the acoustic field itself. Since the body of the hydrophone developed in this study is a titanium wire with diameter of 0.3 mm, disturbance in acoustic field measurement by our hydrophone can be remarkably reduced. It was confirmed that the receiving sensitivity of our hydrophone was about -280 dB (0 dB=1 V/μPa) in the frequency range 1 MHz to 10 MHz.
Keywords :
acoustic field; acoustic measurement; hydrophones; needles; titanium; 1 to 10 MHz; PZT poly-crystal film; acoustic field measurement; hydrothermal method; needle type miniature hydrophone; receiving sensitivity; titanium wire; Blades; Fabrication; Frequency; Mineralization; Needles; Piezoelectric films; Sonar equipment; Substrates; Titanium; Wire;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1418276
