Title :
Theoretical analysis of MUT using a simple 1D model
Author :
Wilm, M. ; Ballandras, S.
Author_Institution :
UMR CNRS, Besancon, France
Abstract :
Micromachined ultrasonic transducer (MUT) structures are periodic, associating numerous elementary actuators excited in phase. Their simulation requires their operating conditions to be accounted for correctly. The development of an equivalent to the Mason model for MUTs would help in their promotion. We propose a simple model based on the material resistance theory to describe the flexural motion of a MUT. It is associated with the development of a periodic Green´s function to simulate radiation in water.
Keywords :
Green´s function methods; micromechanical devices; ultrasonic transducers; 1D model; Mason model; elementary actuators; flexural motion; material resistance theory; micromachined ultrasonic transducer; periodic Green function; periodic structures; Biomembranes; Boundary conditions; Electronic mail; Electrostatic analysis; Equations; Ferroelectric materials; Finite element methods; Interpolation; Polynomials; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1418282