Two-dimensional fluid simulation of electronegative discharge plasmas

Summary form only given, as follows. A two-dimensional fluid simulation code in cylindrical coordinates has been developed to simulate the plasma dynamics of capacitively coupled rf electronegative discharges. The model equations include the continuity equations of electrons and ions, Poisson equation, and electron energy balance equation. The transport coefficients are functions of the local electron temperature obtained from the energy equation. The two-dimensional distributions of charged particle densities, electric field, electron temperature, ionization rate are calculated. The effects of the applied rf voltage, the driver frequency, the gas pressure on the radial profiles of the electric field and charged particle densities are investigated in detail. The geometry of the device can be extended to a closed cylindrical chamber in which one of the endplate is powered while the cylinder wall and the other plate is grounded. In addition, the simulation results using a two-dimensional particle-in-cell code are also presented for a comparison.