Title :
Optical properties of epitaxial PLZT thin films fabricated by a sol-gel method
Author :
Ishii, Masatoshi ; Satoh, Keisuke ; Kato, Masayuki ; Kurihara, Kazuaki
Author_Institution :
Fujitsu Ltd., Kanagawa, Japan
Abstract :
The composition dependence near the morphotropic phase boundary (MPB) composition of refractive index and electric-optic (EO) coefficient of the epitaxial (Pb1-x, Lax)(Zr1-y, Tiy)1-x4/O3 [PLZT] thin films were investigated. PLZT films were fabricated on Nb doped SrTiO3 [Nb-STO] (100) substrates by a sol-gel method. The TE- and TM-mode of optical properties were measured separately. Depending on La content the refractive index were varied up to 2 %. This is adequate for fabrications of waveguide structures. Birefringence became small from 4×10-3 to 1×10-3 as the crystal structure became close to cubic. The EO coefficient of PLZT (9/65/35) thin films was 45 pm/V, and only a small polarization dependence of the EO coefficient was observed. PLZT optical waveguide that was structured changing PLZT compositions was fabricated on Nb-STO substrate. TE- and TM-modes have similar EO coefficients of 41-42 pm/V.
Keywords :
birefringence; crystal structure; electro-optical effects; epitaxial layers; ferroelectric ceramics; ferroelectric thin films; lanthanum compounds; lead compounds; light polarisation; optical waveguides; refractive index; sol-gel processing; PLZT; PbLaZrO3TiO3; TE- and TM-mode; birefringence; cubic crystal structure; electric-optic coefficient; epitaxial PLZT thin films; morphotropic phase boundary composition; optical properties; optical waveguide; polarization; refractive index; sol-gel method; waveguide structures; Electrooptical waveguides; Niobium; Optical films; Optical refraction; Optical variables control; Optical waveguides; Refractive index; Substrates; Transistors; Zirconium;
Conference_Titel :
Applications of Ferroelectrics, 2004. ISAF-04. 2004 14th IEEE International Symposium on
Print_ISBN :
0-7803-8410-5
DOI :
10.1109/ISAF.2004.1418341