Design and Modeling of Nanomechanical Sensors Using Silicon 2-D Photonic Crystals

We present design and simulation results of a NEMS (Nanoelectromechanical system) based mechanical sensor using a silicon suspended-beam comprising two-dimensional (2-D) photonic crystal (PhC) microcavity structure. A silicon line defect in a 2-D photonic crystal is considered as a waveguide for confining light propagation within waveguide. The resonant band gap structure is added into a PhC waveguide and leads to sharp resonant peak in output spectrum. Since the resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the micro-cavity. Results of resonant wavelength shift regarding to deformation or force loading on the suspended PhC waveguide beam are calculated. Thus deformation and force loads can be detected in terms of resonant wavelength shift.