Title :
Optical micro-scanner fabricated on stainless steel by aerosol deposition method
Author :
Lebedev, Maxim ; Sato, Harumichi ; Akedo, Jun
Author_Institution :
Adv. Manufacturing Res. Inst., National Inst. of Adv. Industrial Sci. & Technol., Tsukuba, Japan
Abstract :
An optical micro scanner, having a high speed performance at high resonance frequency of 15.8 kHz and scan angle (peak to peak value) of 18 degree in atmospheric ambient, was successfully fabricated by depositing via the aerosol deposition method of the piezoelectric materials at a high deposition rate onto the metal scanner structure, which was fabricated by mechanical machining.
Keywords :
aerosols; machining; micro-optics; optical scanners; piezoelectric materials; stainless steel; vapour deposition; aerosol deposition method; atmospheric ambient; deposition rate; mechanical machining; metal scanner structure; optical microscanner fabrication; piezoelectric materials; resonance frequency; scan angle; stainless steel; Aerosols; High speed optical techniques; Micromechanical devices; Optical devices; Piezoelectric films; Piezoelectric materials; Resonance; Silicon; Steel; Substrates;
Conference_Titel :
Applications of Ferroelectrics, 2004. ISAF-04. 2004 14th IEEE International Symposium on
Print_ISBN :
0-7803-8410-5
DOI :
10.1109/ISAF.2004.1418362
