Title :
Development of bimorph vibrator using lead free BNT piezoelectric film deposited by hydrothermal method
Author :
Hasegawa, Tomohito ; Kawashima, Norimichi ; Ishikawa, Mutsuo ; Kurosawa, Minoru ; Takeuchi, Shinichi
Author_Institution :
Dept. of Biomedical Eng., Toin Univ, Yokohama, Japan
Abstract :
PZT piezoelectric film synthesized hydrothermally has been studied actively in our laboratory. However, it is apprehended recently that PZT affects health and the environment, because PZT is chemical compound containing lead. Therefore, we tried to synthesize lead free BNT piezoelectric film on titanium substrate hydrothermally. The synthesized BNT films on titanium substrates were evaluated with SEM image, XRD pattern and EDS. We fabricated bimorph vibrators with synthesized lead free BNT film and evaluated their performances.
Keywords :
X-ray chemical analysis; X-ray diffraction; bismuth compounds; crystal growth from solution; piezoelectric devices; piezoelectric thin films; scanning electron microscopy; sodium compounds; (Bi0.5Na0.5)TiO3; EDS; SEM; Ti; XRD; bimorph vibrator; hydrothermal method; lead free BNT piezoelectric film; Biomedical engineering; Blades; Environmentally friendly manufacturing techniques; Laboratories; Performance evaluation; Piezoelectric films; Piezoelectric materials; Substrates; Temperature; Titanium;
Conference_Titel :
Applications of Ferroelectrics, 2004. ISAF-04. 2004 14th IEEE International Symposium on
Print_ISBN :
0-7803-8410-5
DOI :
10.1109/ISAF.2004.1418381
