Title :
A New Equivalent Circuit Model of MIM Capacitor for RFIC
Author :
Lintao, Liu ; Jinxiang, Wang ; Lai, Feng-Chang
Author_Institution :
Harbin Inst. of Technol., Harbin
Abstract :
A new scalable Metal-Insulator-Metal (MIM) capacitor model is presented for RF (Radio Frequency) applications. Four MIM capacitors were fabricated in 0.13 U m CMOS technology. Using physical analysis based on the new model, parameter optimization and curve fitting, the scaling rules are given for all elements on the circuit model. The model fits very well with the measured data in the frequency range 500 MHz-10.01 GHz. The results show that the proposed model provides accurate results, while retaining the physical properties of every element in the model.
Keywords :
CMOS integrated circuits; MIM devices; capacitors; equivalent circuits; integrated circuit modelling; radiofrequency integrated circuits; CMOS technology; MIM capacitor; RFIC; curve fitting; equivalent circuit model; frequency 500 MHz to 10.01 GHz; metal-insulator-metal capacitor model; parameter optimization; size 0.13 mum; CMOS technology; Curve fitting; Equivalent circuits; Integrated circuit measurements; MIM capacitors; Metal-insulator structures; Radio frequency; Radiofrequency integrated circuits; Scattering parameters; Semiconductor device modeling;
Conference_Titel :
Microwave and Millimeter Wave Technology, 2007. ICMMT '07. International Conference on
Conference_Location :
Builin
Print_ISBN :
1-4244-1049-5
Electronic_ISBN :
1-4244-1049-5
DOI :
10.1109/ICMMT.2007.381401
