Title :
One Novel Design Method of the Millimeter-wave MEMS Filter
Author :
Yang, Huaizhi ; Sun, Houjun ; Yu, Weihua ; Lv, Xin
Author_Institution :
Beijing Inst. of Technol., Beijing
Abstract :
In this paper, one novel design method is presented for millimeter-wave Micro-Electro-Mechanical-Systems (MEMS) filters based on Finite Element Method(FEM), which results are validated by comparison to the traditional FDTD method. Moreover, one MEMS filter´s design and fabrication flow are studied, and some significant academic analyzing and engineering application are obtained, which is helpful for millimeter-wave miniature passive devices design using MEMS fabrication technology.
Keywords :
finite element analysis; micromechanical devices; millimetre wave filters; MEMS fabrication technology; finite element method; millimeter wave MEMS filter; Chemical technology; Design methodology; Fabrication; Filters; Finite difference methods; Micromechanical devices; Millimeter wave circuits; Millimeter wave communication; Millimeter wave radar; Millimeter wave technology; FEM; Filter; MEMS;
Conference_Titel :
Microwave and Millimeter Wave Technology, 2007. ICMMT '07. International Conference on
Conference_Location :
Builin
Print_ISBN :
1-4244-1049-5
Electronic_ISBN :
1-4244-1049-5
DOI :
10.1109/ICMMT.2007.381416
