Title :
Complicated Subthreshold Behavior of Undoped Cylindrical Surrounding-Gate MOSFETs
Author :
Bian, Wei ; He, Jin ; Chen, Yu ; Fu, Yue ; Zhang, Rui ; Zhang, Lining ; Chan, Mansun
Author_Institution :
Peking Univ., Shenzhen
Abstract :
This paper studied the complication of sub-threshold slope and threshold voltage of undoped Surrounding-Gate (SRG) MOSFETs based on a rigorous classical channel potential model. The detail theoretical analysis demonstrates that the sub-threshold behavior of SRG MOSFETs strongly depends on the silicon body radius. The ideal sub-threshold slope factor S = 60 mV/Dec only appears when the body radius is smaller than a critical value. With a larger silicon body radius, a dual sub-threshold slope factor is displayed. The complex sub-threshold behavior of SRG MOSFETs complicates the definition and extraction of the threshold voltage, which has also been studied in this paper.
Keywords :
MOSFET; threshold elements; classical channel potential model; complicated subthreshold behavior; dual subthreshold slope factor; silicon body radius; sub-threshold slope; threshold voltage; undoped Surrounding-Gate MOSFETs; undoped cylindrical surrounding-gate MOSFETs; CMOS technology; Fluctuations; Helium; MOSFETs; Potential well; Semiconductor device modeling; Silicon; Threshold voltage; Tunneling; Uncertainty;
Conference_Titel :
Electron Devices and Solid-State Circuits, 2007. EDSSC 2007. IEEE Conference on
Conference_Location :
Tainan
Print_ISBN :
978-1-4244-0637-1
Electronic_ISBN :
978-1-4244-0637-1
DOI :
10.1109/EDSSC.2007.4450193