Title :
A single-chip CMOS resonant beam gas sensor
Author :
Hagleitner, G. ; Lange, D. ; Brand, O. ; Hierlemann, A. ; Baltes, H.
Author_Institution :
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
A micromachined resonant beam gas sensor for detection of organic volatiles is monolithically integrated with thermal actuators, piezoresistive read out, and circuitry for self-excitation and fabricated in standard CMOS technology. Mass load due to analyze absorption in a sensitive coating changes beam resonance frequency. The limit of detection is 1 ppm for toluene.
Keywords :
CMOS integrated circuits; bridge circuits; circuit feedback; digital readout; gas sensors; microsensors; mixed analogue-digital integrated circuits; 0.8 micron; CMOS resonant beam gas sensor; CMOS-MEMS sensor; beam resonance frequency; digital read out; micromachined cantilever; micromachined gas sensor; monolithic integration; organic volatiles detection; piezoresistive Wheatstone bridge; piezoresistive read out; self-excitation circuitry; single-chip gas sensor; standard CMOS technology; thermal actuators; Absorption; Actuators; CMOS technology; Coatings; Gas detectors; Integrated circuit technology; Piezoresistance; RLC circuits; Resonance; Resonant frequency;
Conference_Titel :
Solid-State Circuits Conference, 2001. Digest of Technical Papers. ISSCC. 2001 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-6608-5
DOI :
10.1109/ISSCC.2001.912623
