DocumentCode
2984762
Title
SH-SAW transducer analysis on single crystal KNbO3 for liquid sensors
Author
Pollard, T.B. ; Kenny, T.D. ; Da Cunha, M. Pereira
Author_Institution
Dept. of Electr. & Comput. Eng, Maine Univ., Orono, ME, USA
fYear
2004
fDate
23-27 Aug. 2004
Firstpage
390
Lastpage
395
Abstract
A BEM numerical analysis of IDT structures on Euler angles (0°, 90°, 0°) KNbO3 has been performed. The analysis considered IDT excitation of both the SH-SAW and SH-BAW modes. The results were targeted at addressing specific issues relevant to liquid sensor applications, such as power partitioning between the SH-SAW and SH-BAW, and SH-BAW power radiation direction into the substrate. The designs with metalized regions outside the IDT seem most promising for liquid sensing applications. Second and third higher order frequency responses for a 5 finger IDT structure showed that 94% and 80%, respectively, of the total input power is converted to the SH-SAW. This result indicates the potential for high frequency applications or sensing platforms that exhibit higher sensitivity at higher operating frequencies. A more rigorous analysis using a combined FEM/BEM tool was also performed, proving there is no need to consider mass loading effects in the analysis of practical IDT structures on the KNbO3 propagation direction.
Keywords
boundary-elements methods; bulk acoustic wave devices; finite element analysis; interdigital transducers; level measurement; potassium compounds; surface acoustic wave sensors; surface acoustic wave transducers; BEM numerical analysis; FEM; IDT excitation; IDT metalized regions; IDT structures; KNbO3; SH-BAW mode; SH-SAW transducer; liquid sensors; mass loading effects; power partitioning; power propagation direction; substrate power radiation direction; Acoustic propagation; Acoustic sensors; Acoustic transducers; Electrodes; Frequency; Mathematical model; Niobium compounds; Optical harmonic generation; Optical surface waves; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International
ISSN
1075-6787
Print_ISBN
0-7803-8414-8
Type
conf
DOI
10.1109/FREQ.2004.1418487
Filename
1418487
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